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| Townships | 1850 | 1860 | 1870 | 1880 | 1890 | 1900 |
|---|---|---|---|---|---|---|
| Benton | 730 | 729 | 640 | 592 | 620 | 725 |
| Newport | 964 | 1170 | 1289 | 1231 | 1164 | 1145 |
| Antioch | 1192 | 1494 | 1595 | 1472 | 1704 | 1941 |
| Grant (note 2) | 423 | 500 | 572 | 477 | 511 | 638 |
| Avon | 1010 | 1129 | 1005 | 1016 | 1081 | 1434 |
| Warren | 1007 | 1124 | 1235 | 1137 | 1077 | 1265 |
| Waukegan | 2949 | 3938 | 5014 | 4491 | 5348 | 10466 |
| Shields | 554 | 671 | 1262 | 1336 | 1751 | 3625 |
| Libertyville | 756 | 1111 | 1236 | 1327 | 1694 | 2148 |
| Fremont | 776 | 1005 | 1015 | 1116 | 1065 | 1086 |
| Wauconda | 774 | 1045 | 1120 | 1046 | 1097 | 1083 |
| Cuba | 333 | 872 | 970 | 981 | 956 | 1109 |
| Ela | 988 | 1228 | 1277 | 1412 | 1296 | 1243 |
| Vernon | 959 | 1219 | 1259 | 1244 | 1198 | 1172 |
| West Deerfield | (note 1) | (note 1) | (note 1) | (note 1) | 783 | 770 |
| Deerfield | 811 | 1022 | 1525 | 2418 | 2890 | 4654 |
| --TOTAL-- | 14,226 | 18,257 | 21,014 | 21,296 | 24,235 | 34,504 |